Use Matlab Code to Link and Pilot Softwares Used for MEMS Simulation
نویسندگان
چکیده
This paper presents the advances done in the field of simulation and design applied to MEMS. It will be discussed some techniques to link different finite element softwares, especially COMSOL and ANSYS, in order to profit from all the advantages offered by each finite element code. Then, an explication is done on how we piloted ABAQUS using a Matlab routine. In a third and very important section, the use of reverse engineering method is described and applied to RF-MEMS (Radio Frequency-Micro Electro Mechanical System) switches. The applications for each of these methods will be explained.
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تاریخ انتشار 2012